Problem solving stoichiometry: Solve the volume of SiH4?

Posted on 2016-03-14 19:00:00 in Chemistry by MIKKY

Silicon Nitride, Si3N4, is a material that is used in computer chips as an insulator. Silicon nitride can be prepared according to the chemical equation: 

3SiH4(g) + 4NH3(g) ---> Si3N4(g) + 12H2(g) 

If you wanted to prepare a surface film of Si3N4(s) that had an area of 9.0mm^2 and was 4x10^-5mm thick, what volume of SiH4 gas would you need to use at 1x10^-5 torr and 775K? The density of Si3N2 is 3.29g/cm^3.

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